Applications

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The texturing process is the etching step with the highest added value. It modifies the surface of the wafer in order to create a structure that increases the amount of light absorbed in the cell, and therefore increase the overall efficiency of the cell. Current wet processes have limited efficiency and require the deposition of additional anti-reflective layers on top of the cell.

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ONYX© TEXTURING PROCESS

Nines ONYX texturing process delivers surface textures with superior optical properties, with reflectivity as low as 2%. The cells look darker providing best in class asthetic for all type of wafers, including multi-crystalline. The amount of silicon removed to achieve theses textures is minimal, leading to cost saving not only on etching consumables but also on silicon, i.e. the wafers could enter the factory thinner yet the finished cell would have the same thickness as for a wet process.

The flexibility of the process allows a large variety of texture and reflectivity, down to “black-silicon” level, as would be achieved by a RIE vacuum based process.

Nines PV 是一家設備製造商,我們提供乾蝕刻設備給太陽能電池製造商。

我們針對矽硅產品發展出獨特的絨面蝕刻技術: ADE 設備與製程,此技術屏除了真空電漿蝕刻技術例如RIE技術的缺點。

ADE(常壓乾蝕刻)技術不需使用真空腔體及Pump,並使用連續性的量產技術。

ADE採用熱處裡流程,並無需使用任何溫室氣體如(NO SF6, NO NF3),不會對電池及模組製造商增加任何的附加碳稅。

針對蝕刻所用氣體,我們提供在線生產的方案,可以用低廉成本達到量產化目標。

ADE技術的資本投資及營運成本比任何真空系統都低,設備所佔的廠房空間也小於真空系統。

ADE設備的UPH更高達6,000 wafers/hour。ADE製絨技術亦適用於任何矽硅(多晶、單晶、類單晶)表面,也適用於鑽石切割表面。

ADE技術目前使用單面蝕刻製程,但也可針對PERC製程配合提供背面拋光選項,此製程不會在矽晶表面產生離子轟擊以及化學殘留的疑慮。

ADE技術提供太陽能產業一個合適的蝕刻及製絨量產性技術,並符合業界先進製程的技術發展。

目前我們針對電池效率改善部分已經高於0.3%,此一結果已經通過德國Fraunhofer ISE 單位驗整。

ONYX© Process demonstration

In collaboration with Fraunhofer ISE, Freiburg, Nines have demonstrated the ONYX texture process by incorporating the ADE technology in the Fraunhofer ISE pilot production line. The process developed lead to excellent results, with cell efficiencies superior to the standard wet acidic texturing process.

Latest publications: LINK

Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes. Bishal Kafle1,*, Abdul Mannan1,Timo Freund1, Laurent Clochard2, Edward Duffy2, Marc Hofmann1, Jochen Rentsch1 and Ralf Preu1

Article first published online: 7 AUG 2015, DOI: 10.1002/pssr.201510219,physica status solidi (RRL) - Rapid Research Letters, Volume 9, Issue 8, pages 448–452, August 2015

Texturing diamond wire cut wafers:

The ADE texturing process has been demonstrated with several types of crystalline wafers, inlcuding:

- Cast wafers

- Epitaxial layers

- Diamond wire cut wafers.

More specifically, for mc-Si diamond wire cut wafers, the ADE technology provides a high performance texturing solution for industrial customers willing to move from slurry cut to diamond wire cut wafers in order to avail of the full cost benefit that this technology brings. Several industrials have already evaluated succesfully the ADE texturing. The diamond wire wafering technology is expected to grow significantly over the coming years, as detailed by the ITRPV roadmap (www.itrpv.net)

Process flow